Gas Dosing
Vacuum Leak Valves

Industry-leading precision leak valves for ultra-high vacuum applications. Manual and automatic drive options with CF flange connections.

10⁻¹⁰
Torr UHV Range
200°C
Bakeable Temp
Vacuum leak valve system

Our Product Catalogue

Explore our comprehensive range of high-precision vacuum leak valves designed for research and industry applications.

Manual Drive Valves

Precision manual control for laboratory and research applications

Valves with manual Actuator
Common Vakuum Flanges: CF16, Cf40 and VCR

Valves with manual Actuator

F3-NNN-012

The manual actuator provides the possibility to adjust the gasflow with a handwheel. The stroke from open to close position is divided into ten turns of the handwheel. The axial stroke is 10mm, the maximum closing torque is 5 Nm. The handwheel is made of pretected steel. It can be dismantled during baking out. Idealized measurement protocol: The handwheel is kept stable for one minute after every turn. The reaction is fast and the throughput is stable. Durinf the first 3 turns following the open position the diaphragm does not touch the valves seat. When usind the valve at 20°C control in the range between 10-9 and 10-10 mbarl/s is ot possible due to physical restrictions (red area in the diagram). The valve is then tight aufter the 9th turn. Control in this area needs heating. The maximum throughput is 60 mbar*l/s. Actual measurement protocol: Different leakrates (=throughput) are being appraoched and held for 20 seconds.

UHV-Leakvalve ND 3
CF-16 on the side and at the bottom (manually operated)

UHV-Leakvalve ND 3

F3CF1616-012

The manual actuator provides the possibility to adjust the gasflow by a habdwheel. The stroke from open to close position is divided into ten turns of the handwheel. the axial stroke is 10mm, the maximum closing torque is 5 Nm. The handwheel is made of pretected steel. It can be dismantled during baking out.

Automatic Drive Valves

Computer-controlled precision for production and automated systems

Stepopermotor driven CF16
CF16

Stepopermotor driven CF16

F3-CF1616-46

The steppermotor driven valve allows the automation of the gasdosing process. By menas of the steppermotor driven UHV Gasdosing Valve closed loop control of gas flow or pressure in all vacuum areas from low, fine and high to ultrahigh vacuum is possible. The controller provides different infterfaces: USB Ethernet MODBUS Analog (M12 connector) You may also: Connect a snesor (flow, pressure) to it and control your process as a closed loop. Control the valve manually via touch input. The resolution per stroke is very high: 1,000,000 steps. The valve has an encoder, so ythe process is monitored. Ther is also a visual indication of the valve position. A thermal insulation ensures, that you can heat the valve body up to 150°C, while the motor is connected. For higher bake-out temperatures, you have to disconnect the motor. The products ships with Controler, mains cable, USB-connections cable and 5m Motor cable.

Custom Solutions

Made-to-specification valves for unique applications

3-way valve
CF16

3-way valve

CF161616

Threway function

Looking for a Custom Solution?

We design and manufacture vacuum leak valves tailored to your exact specifications — special materials, flanges, leak rate ranges, and control systems available.